Applied Materials claims 65 nanometres breakthrough

It has what it describes as a full complement of transistor, interconnect and inspector machinery and systems to make (fabricate) the next downsizing trend in semiconductors.

Applied makes the highly expensive equipment used by semiconductor customers which might include Intel to make integrated circuits.

The technologies the firm is showing off include the Applied Quantum X, a single wafer high current ion implanter, the Reflexion LK ECMP, an electro chemical mechanical planarisation system that takes copper from the wafer, and the HARP Gap Fill system which will improve transistor performance.

Mike Splinter, who used to be a top Intel nabob, claimed that customers are flocking to Applied for the kit necessary to build 65 nanometre devices.

According to him, just shrinking chip dimensions isn't enough in the 21st century. "The industry depends on new materials and manufacturing technologies," he said. µ

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